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Sapphire polishing slurry (WH series)
Alumina polishing slurry is designed for C-plane sapphire polishing, and it has a good performance. The removal rate is
high, the surface defects after polishing are decreased, a higher yield can be obtained. Especially in the remove rate, the alumina polishing slurry has a significant increase compared with the previous silica polishing slurry, which is almost two times. Xinanna co. LTD has developed a series of SiC slurry including WH-M1, WH-X1 and WH-B8S.

 

Advantage:  1. Good surface quality: surface roughness (Ra<0.3nm).  2. High removal rate (>10μm/h).    3. Long life.